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Issue Date Title Author(s) Journal View
2017-07
MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate

Jang, Jongmoon ;  Jang, Jeong Hun ;  Choi, Hongsoo

Journal of Micromechanics and Microengineering, v.27, no.7, 2017-07

 806
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